| About |
|---|
| Description Perlast® G70H provides optimal performance in high-temperature, chemically and mechanically demanding environments. This highly reinforced material offers extended seal life, offering low plasma etch rates in flat panel and thin-film solar CVD processes and the high mechanical strength needed to cope with the high forces repeatedly applied in these large scale applications. Perlast® G70H is available as fully moulded O-rings (any size up to 2m/6.5ft internal diameter) and fully moulded formed slit valve door seals up to 3m in length for generation 10 and above. Key Attributes Excellent plasma resistance High temperature performance High mechanical strength High abrasion resistance Extremely low out-gassing properties Typical Applications Slit valve door seals ISO valve seals Load lock seals NW / KF / ISO O-rings&& |
| Product Description | |
|---|---|
| Generic | PFE |
| Material Status | Commercial: Active |
| Features | Good Rigidity,High Heat Resistance,Low odor,Good wear resistance,Solvent resistance |
| Availabilitys | North America,Asia Pacific,Europe |
| Technical Data | |||
|---|---|---|---|
| MECHANICAL | Nominal value | Unit | Test method |
| IRHD hardness | 70 | ASTM D1415 , ISO 48 | |
| elastic body | Nominal value | Unit | Test method |
|---|---|---|---|
| tensile strength | |||
| yield | 14.7 | MPa | ASTM D412 , ISO 37 |
| 100% strain | 9.30 | MPa | ASTM D412 , ISO 37 |
| Tensile strain | |||
| fracture | 200 | % | ASTM D412,ISO 37 |
| Compression deformation | |||
| 200℃,24 hr | 17 | % | ASTM D395,ISO 815 |
| THERMAL | Nominal value | Unit | Test method |
|---|---|---|---|
| Maximum operating temperature | 310 | ℃ | |
| Linear coefficient of thermal expansion | 4.00E-4 |
| Notes |
|---|
| 1. Typical properties: these are not to be construed as specifications. |
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