| About |
|---|
| A translucent beige compound with semi-crystalline perfluoropolymer nano-filler, specially developed to meet the demands of the semiconductor and bio-analytical industries. Compatible with fluorine based chemistries and universally suitable for both wet and dry semiconductor processes including Lithography, Plasma, PVD, CVD, Etch, Stripping and Cleaning. Perlast® G74P combines a fully fluorinated polymer backbone, a fully fluorinated nano-filler system (no inorganic fillers) and a highly fluorinated cross-linking process, which results in a perfluoroelastomer with unrivalled purity, chemical resistance and mechanical properties. Perlast® G74P exhibits extremely low out-gassing properties, making it ideal for use in vacuum applications. Key Attributes Exceptionally pure – does not contain any inorganic fillers which may cause particulation problems. Excellent chemical and temperature resistance. Excellent mechanical properties. Extremely low out-gassing properties making it ideal for vacuum sealing applications. High material compliance reduces surface permeation. Reduced first wafer effect. Lower cost of ownership. Typical Applications Dynamic seals Static seals Wafer-handling products&& |
| Product Description | |
|---|---|
| Generic | PFE |
| Material Status | Commercial: Active |
| Features | High purity,High Heat Resistance,Low odor,Solvent resistance,Heat Stabilized |
| Availabilitys | North America,Asia Pacific,Europe |
| Technical Data | |||
|---|---|---|---|
| MECHANICAL | Nominal value | Unit | Test method |
| Shore hardness | |||
| Shaw’s A | 74 | ASTM D2240 | |
| IRHD hardness | 70 to 80 | ASTM D1415 , ISO 48 | |
| elastic body | Nominal value | Unit | Test method |
|---|---|---|---|
| tensile strength | |||
| yield | 20.0 | MPa | ASTM D412 , ISO 37 |
| 100% strain | 5.80 | MPa | ASTM D412 , ISO 37 |
| Tensile strain | |||
| fracture | 260 | % | ASTM D412,ISO 37 |
| Compression deformation | ASTM D395 , ISO 815 | ||
| 200℃,24 hr | 24 | % | ASTM D395,ISO 815 |
| 204℃,70 hr | 38 | % | ASTM D395,ISO 815 |
| THERMAL | Nominal value | Unit | Test method |
|---|---|---|---|
| Maximum operating temperature | 275 | ℃ | |
| Linear coefficient of thermal expansion | 5.70E-4 |
| Notes |
|---|
| 1. Typical properties: these are not to be construed as specifications. |
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